• The plurality of gas channels is connected to an edge gas plenum surrounding the substrate support.

    多个气体通道连接一个围绕基片支撑件的边缘气体

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  • This gas plenum is used to capture the fission products which are gasses such that the fuel pin does not over-pressurise.

    这个气体空间用来获取裂变气体生成物这样燃料大头针,就不会被过度增压。

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  • The edge gas plenum is connected to a central gas plenum disposed within and near the center of the substrate support through a plurality of gas supply channels.

    边缘气体通过多个气体供应管道连接一个设置在该基片支撑靠近该基片支撑件中心中央气体室。

    youdao

  • The edge gas plenum is connected to a central gas plenum disposed within and near the center of the substrate support through a plurality of gas supply channels.

    边缘气体通过多个气体供应管道连接一个设置在该基片支撑靠近该基片支撑件中心中央气体室。

    youdao

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