Gas mixing is one of the most important applications in micro flow systems.
气体混合是微流动系统的重要应用之一。
Based on the Reynold's equations with the micro scale effects considered, a new kind of approximate algorithm for the inner flow of the spiral grooved gas seals was set up in this paper.
本文引用考虑微尺度效应的雷诺方程，推导出了考虑微尺度效应的螺旋槽干气密封内部流动的近似算法。
It is proved that the uniformity of etch rate can be improved and the effect of micro load can be decreased by adjusting the value of chamber pressure, gas flow rate and RF power properly.
结果表明，通过对反应室压力、刻蚀气体流量和射频功率的调节，可以降低微负载效应的影响，得到良好的刻蚀均匀性。
The influence of chamber pressure, gas flow rate and RF power on micro loading effect in reactive ion etch of silicon dioxide is researched.
对二氧化硅反应离子刻蚀中反应室压力，刻蚀气体流量和射频功率等因素对刻蚀速率和刻蚀均匀性的影响进行了研究。
Based on a viscosity amendment model of gas flow in micro-gap, squeezs gas film damping effect on micro plates is investigated.
基于微缝隙气流的粘度修正模型，分析了气体对微圆盘的压膜阻尼效应，得到微圆盘表面的压强分布、压膜阻尼力和压膜阻尼系数的解析解。
Based on analyzing the micro critical seepage phenomena of gas-liquid two-phase flow in a single fracture, a random and compound mathematical model was constructed to describe this phenomenon.
通过对裂缝中气液二相流体临界渗流现象的分析推理，建立描述这一现象的随机混合渗流数学模型。
Simulation and analysis for gas flow and heat transfer in micro nozzle;
深入研究微喷管内流场性能有助于微推进系统的优化设计。
This paper is focused on the design and implementation of micro thermal gas flow sensors.
本论文着重阐述了应用于工业领域的微型热式流量传感器的设计与实现。
The gas flow path of SP - 3420 gas chromatograph was modified by adding a 10-way switch valve for analyzing micro-amount CO and CO2 in polymer grade propylene.
为了分析聚合级丙烯中的CO和CO2，对SP-3420型气相色谱仪的气路系统作了改装，增加了一个十通阀。
The gas flow path of SP - 3420 gas chromatograph was modified by adding a 10-way switch valve for analyzing micro-amount CO and CO2 in polymer grade propylene.
为了分析聚合级丙烯中的CO和CO2，对SP-3420型气相色谱仪的气路系统作了改装，增加了一个十通阀。
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