The composition, surface morphology and phase structure of the films were tested by EDXA, FSEM, AFM and XRD, respectively.
并通过EDXA、FSEM、AFM和XRD等手段，检测薄膜的成分、表面截面形貌和相结构。
The composition, surface morphology and phase structure of the films were tested by EDXA, FSEM, AFM and XRD, respectively.
并通过EDXA、FSEM、AFM和XRD等手段，检测薄膜的成分、表面截面形貌和相结构。
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