By introducing the design of the force balance silicon accelerometer, this paper describes the ideas and methods of the MEMS products.
介绍了力平衡式硅加速度计的设计，勾画了MEMS产品的一般设计思路和方法。
The moment device is a key part of a force-balance accelerometer.
力矩器是力平衡加速度表的关键组件。
The moment reactive coefficient is given, and the effect of moment reactive coefficient on expanding the measurement range and improving the accuracy of force-balance accelerometer is analyzed.
给出了反馈力矩系数，分析了力矩系数对提高加速度表量程和保证精度的作用。
The moment reactive coefficient is given, and the effect of moment reactive coefficient on expanding the measurement range and improving the accuracy of force-balance accelerometer is analyzed.
给出了反馈力矩系数，分析了力矩系数对提高加速度表量程和保证精度的作用。
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