In another embodiment, a plasma-processing chamber is adapted to create a neutral current bypass path that reduces electric current flow through a magnetic field-generating feature in the chamber.
在另一实施例中，一等离子处理腔室是适用以建立一中性电流分流路径，其可以减少电流，其中该电流是流动通过腔室中一产生磁场的特征结构。
In another embodiment, a plasma-processing chamber is adapted to create a neutral current bypass path that reduces electric current flow through a magnetic field-generating feature in the chamber.
在另一实施例中，一等离子处理腔室是适用以建立一中性电流分流路径，其可以减少电流，其中该电流是流动通过腔室中一产生磁场的特征结构。
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