A fiber Fizeau interferometer for measurement of micro-vibration of MEMS devices is presented, which is simple in configuration and easy to operate.
提出一种结构简单、使用方便的用于微电子机械部件运动状态测量的光纤斐索干涉装置。
A fiber optic ultrasonic sensor based on Fizeau interferometer for the measurement of ultrasonic wave propagated on the surface of a solid plate has been proposed and demonstrated.
验证了一种基于光纤Fizeau干涉仪的声发射传感器，可用于固体表面传播的超声波的检测。
With the Fresnel diffraction approximation method, the influences of the collimated lens and standard lens surface errors on the transparence testing are analyzed in Fizeau interferometer.
根据菲涅耳衍射近似理论，就菲佐干涉仪中的准直镜和标准镜面形误差对透过检测的影响进行了研究。
With the Fresnel diffraction approximation method, the influences of the collimated lens and standard lens surface errors on the transparence testing are analyzed in Fizeau interferometer.
根据菲涅耳衍射近似理论，就菲佐干涉仪中的准直镜和标准镜面形误差对透过检测的影响进行了研究。
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