Combined with characteristics of functional films, a photosensitive sol-gel technique, in this paper, was examined, during which the fine-patterning process of the films was taken into consideration.
本研究结合功能薄膜的特点，研究了感光溶胶-凝胶技术，在薄膜的制备过程中就考虑到薄膜的微细加工。
To make a TFT-LCD panel which has higher performance, fine patterning process of photolithography is needed. Making smaller via pattern is one of main issue for fine patter - ning.
为了获得更高性能的TFT - LCD面板，在光刻时保证精细的图形成像十分重要，其中，如何制作出尺寸更小的通孔图形是主要的问题之一。
To make a TFT-LCD panel which has higher performance, fine patterning process of photolithography is needed. Making smaller via pattern is one of main issue for fine patter - ning.
为了获得更高性能的TFT - LCD面板，在光刻时保证精细的图形成像十分重要，其中，如何制作出尺寸更小的通孔图形是主要的问题之一。
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