The experiment of measuring the thickness of ZAO film and SEM fracture inspection proves that the method of correction is useful to improve the measurement precision.
通过制备掺铝氧化锌(ZAO)薄膜及SEM断口观察进行实验验证，证实该修正方法有助于提高膜厚测量精度。
The experiment of measuring the thickness of ZAO film and SEM fracture inspection proves that the method of correction is useful to improve the measurement precision.
通过制备掺铝氧化锌(ZAO)薄膜及SEM断口观察进行实验验证，证实该修正方法有助于提高膜厚测量精度。
应用推荐