According to the practical fabrication process of CSG, a comprehensive fabrication error model of CSG including alignment error, duty cycle error, depth error and stair slope error is built up.
根据色分离光栅的实际制作过程建立了包含对位误差、占空比误差、刻蚀深度误差、塌边误差等多种制作误差的色分离光栅加工误差模型。
For the HRG's technology fabrication deviation, effect of the resonator's thickness nonuniformity on the gyro accuracy is studied. The error model is established and the error mechanism is analyzed.
针对半球谐振陀螺仪的工艺制造偏差，研究半球谐振子薄壁厚度不均匀对陀螺精度的影响，建立误差模型，分析误差机理。
For the HRG's technology fabrication deviation, effect of the resonator's thickness nonuniformity on the gyro accuracy is studied. The error model is established and the error mechanism is analyzed.
针对半球谐振陀螺仪的工艺制造偏差，研究半球谐振子薄壁厚度不均匀对陀螺精度的影响，建立误差模型，分析误差机理。
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