The process was controllable and could be applied to strip the photoresist residual of diffractive optical element fabricated on the thick substrate.
该工艺具有良好的可控性，解决了在厚基片上制作大口径衍射光学元件时残余光刻胶的去除问题。
CGH element is designed and fabricated based on the computer generated hologram and the binary optical technique, and is applied in wavefront transformation.
运用计算全息原理与二元光学技术设计制作了用于波面变换的计算全息cgh元件。
The micro gas pressure sensor designed in this thesis can be fabricated using an IC compatible process, and it is composed of a heating resistor, a sensitive element and a testing resistor.
本文设计的微气压传感器的制作工艺与集成电路工艺兼容，结构上主要包括加热电阻、敏感元件和测试电阻等三部分。
A novel binary optical element, which has the functions of filtering, beam-splitting and imaging, is designed and fabricated.
本文利用微光学技术设计并研制了一种同时具有滤波、分束和成象功能的二元光学全互连器件。
Sensor element, which consists of a Fabry-Perot etalon fabricated from single-crystal silicon, connects with the LED and detector by fibers.
传感器敏感元件主体结构采用单晶硅的法布里帕罗标准具，并通过光纤与发光二极管和光电探测器等光学元件相连。
A 4096 element linear CCPD image device has been successfully designed and fabricated with double-linear three phase buried-channel construction.
采用双线型三相埋沟结构，设计并研制成功4096位线阵CCPD摄像器件。
A 4096 element linear CCPD image device has been successfully designed and fabricated with double-linear three phase buried-channel construction.
采用双线型三相埋沟结构，设计并研制成功4096位线阵CCPD摄像器件。
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