The general EUV sources, discharge produced plasma (DPP) and laser produced plasma (LPP), were compared in many respects.
对国际上普遍采用的两种EUV光源:放电等离子体源(DPP)和激光等离子体源(LPP)进行了多方面比较。
The general EUV sources, discharge produced plasma (DPP) and laser produced plasma (LPP), were compared in many respects.
对国际上普遍采用的两种EUV光源:放电等离子体源(DPP)和激光等离子体源(LPP)进行了多方面比较。
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