If, once in the developing after etching, anti etch removal is not clean, can cause a short-circuit defect.
如果，一旦于显影后蚀刻前，出现抗蚀刻剂去除不净，会导致短路缺陷的发生。
Etch - a process of chemical reactions or physical removal to rid the wafer of excess materials.
蚀刻-通过化学反应或物理方法去除晶圆片的多余物质。
Etch - a process of chemical reactions or physical removal to rid the wafer of excess materials.
蚀刻-通过化学反应或物理方法去除晶圆片的多余物质。
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