Based on the diffraction optical principle, a formula of the diffraction efficiency and etching depth error of the microlens is obtained.
基于衍射光学原理，获得了微透镜的衍射效率与蚀刻深度误差之间的关系式。
Based on the diffraction optical principle, a formula of the diffraction efficiency and etching depth error of the microlens is obtained.
基于衍射光学原理，获得了微透镜的衍射效率与蚀刻深度误差之间的关系式。
应用推荐