Epitaxial deposition is then used to form an epitaxial layer on the epitaxy surface.
外延沉积接着用以形成一外延层于该外延表面上。
An epitaxial deposition process including a dry etch process, followed by an epitaxial deposition process is disclosed.
本发明提供一外延沉积工艺，其包含干式蚀刻工艺与后续的外延沉积工艺。
The major aspects of the recent development in the growth, characterization and applications of the hetero epitaxial diamond films by chemical vapor deposition were reviewed.
评论了国内外化学气相沉积的异质外延金刚石膜制备技术、性质表征以及应用和展望。
Vapour epitaxial grown single-crystal diamond film on diamond surface was obtained by microwave reinforced chemical vapour deposition method, using hydrogen, aceton vapour as source of gas.
用氢气、丙酮蒸汽为源气体，通过微波增强的化学气相沉积方法，实现了在金刚石表面气相外延生长单晶金刚石薄膜。
For the parameter of the epitaxial layer, putting forward a series of measures that let up or repress deposition and self-doping when the epilayer processing, improve the epilayer quality.
对于外延层必须达到的工艺参数，提出了一系列减小或抑制外延过程中扩散效应和自掺杂效应的工艺措施和方案，使外延层质量有了明显的提高；
For the parameter of the epitaxial layer, putting forward a series of measures that let up or repress deposition and self-doping when the epilayer processing, improve the epilayer quality.
对于外延层必须达到的工艺参数，提出了一系列减小或抑制外延过程中扩散效应和自掺杂效应的工艺措施和方案，使外延层质量有了明显的提高；
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