An ion energy auto analyzer was designed and implemented for the rapid measurement of plasma ion energy distribution.
为了快速获得等离子体离子能量的分布规律,研制了一套等离子体离子能量自动分析器。
An ion energy auto analyzer was designed and implemented for the rapid measurement of plasma ion energy distribution.
为了快速获得等离子体离子能量的分布规律,研制了一套等离子体离子能量自动分析器。
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