Based on electrochemical etching principles, the paper fabricated the micrometer scale wire electrodes used in WEMM.
本文基于电化学腐蚀原理，制备微细电化学线切割加工中使用的微米尺度线电极。
Firstly, PSMs were prepared by the pulsed electrochemical etching method and the experimental conditions were optimized.
用电化学脉冲腐蚀法制备多孔硅微腔，优化了实验参数。
In the third chapter Porous silicon was prepared by pulsed and dc electrochemical etching methods under the equivalent etching condition.
第三章研究了用脉冲电化学腐蚀制备均匀发光多孔硅。
The biocompatible metal surface of the implant is submitted to electrochemical etching in an electrolyte to which an electric current is applied.
所述植入物的生物相容性金属表面在施加电流的电解质溶液中进行电化学蚀刻。
Patterned porous silicon (PS) films were fabricated based on hydrogen ion implantation technique and typical electrochemical anodic etching method.
基于氢离子注入技术和典型电化学阳极浸蚀法制备了多孔硅有图(PS)薄膜。
The consequences are benefit to Silicon electrochemical micromachining technology and the technology will be hopeful to become an new technology about Silicon deep-holes etching technology.
其结果对进一步开展这方面的研究工作具有指导意义，在进一步深入开展研究电化学体硅微加工技术时，可有望成为实现硅深孔列阵加工的新技术。
The consequences are benefit to Silicon electrochemical micromachining technology and the technology will be hopeful to become an new technology about Silicon deep-holes etching technology.
其结果对进一步开展这方面的研究工作具有指导意义，在进一步深入开展研究电化学体硅微加工技术时，可有望成为实现硅深孔列阵加工的新技术。
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