Micro Systems Engineering includes Micro Electro-Mechanical Systems (MEMS) and related equipment design, manufacture and package.
微系统工程包括微机电系统(MEMS)及相关设备的设计、制造和封装。
The research results of this paper provide the important references to the fault detection of electro-mechanical actuator system in engineering.
本文的研究结论为工程中对电动舵机系统的故障诊断提供了重要参考。
The research results of this paper provide the important references to the fault detection of electro-mechanical actuator system in engineering.
本文的研究结论为工程中对电动舵机系统的故障诊断提供了重要参考。
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