In the chapter 5, Based on the MEMS technology, a method of fabrication of micro EHD pump is presented.
第五章利用MEMS技术，初步研究了一种用于被动传热的微型ehd泵的工艺。
The EHD conduction pump does not require direct injection of electric charges into the fluid.
该EHD传导泵不需要在液体中直接注入电荷。
The EHD conduction pump does not require direct injection of electric charges into the fluid.
该EHD传导泵不需要在液体中直接注入电荷。
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