Sub-micron accuracy of displacement detection is obtained by adopting edge fitting technology and path matching technology.
该方法采用边界拟合和“路径匹配”技术，使位移量的检测精度达到了亚微米级。
The computing methods of ellipse geometric parameters is derived by using coordinate transformation and edge fitting, and the computer simulation result is given.
从椭圆坐标变换和边界拟合出发，推导了椭圆几何参数的计算方法，并给出了计算机模拟检测结果。
The computing methods of ellipse geometric parameters is derived by using coordinate transformation and edge fitting, and the computer simulation result is given.
从椭圆坐标变换和边界拟合出发，推导了椭圆几何参数的计算方法，并给出了计算机模拟检测结果。
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