DY2001A Electron Beam Lithography System (EBLS) is developed as a practical miniature EBLS.

DY 2001a型电子束曝光机是作为实用化的小型曝光系统而研制的。

youdao

DY2001A Electron Beam Lithography System (EBLS) is developed as a practical miniature EBLS.

DY 2001a型电子束曝光机是作为实用化的小型曝光系统而研制的。

youdao