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  • The highest DRE of CF4 is up to 99%. The DRE is increased with the increase of microwave power, and is decreased with the increase of gas flow rate.

    CF 4气体的最高分解率可达99%以上，分解率随微波功率的提高而增加，随气体流速的增加而减小。

    youdao

  • The highest DRE of CF4 is up to 99%. The DRE is increased with the increase of microwave power, and is decreased with the increase of gas flow rate.

    CF 4气体的最高分解率可达99%以上，分解率随微波功率的提高而增加，随气体流速的增加而减小。

    youdao

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