The glassy transition temperature of ion implanted layer decreases along with the increase of dose, the decrease of the glassy transition temperature is independent of implanted ion type.
注入层的玻璃化转变温度随注入剂量的增加而降低,玻璃化温度降低和注入离子的种类无关。
The glassy transition temperature of ion implanted layer decreases along with the increase of dose, the decrease of the glassy transition temperature is independent of implanted ion type.
注入层的玻璃化转变温度随注入剂量的增加而降低,玻璃化温度降低和注入离子的种类无关。
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