Based on characteristics of optical polarizing, Malus law, and Faraday optical rotation, a long-range displacement detector is realized by same light source and double light route.
基于光的偏振特性、马吕斯定理和法拉第旋光效应，采用同光源双光路检测，实现了大量程直线位移的测量。
Point to point control is adopted because a stepping motor is used as a driver. A grating displacement detector is applied in the feedback loop, forming a close loop control system.
该系统以步进电机作为驱动器件，以光栅位移检测装置作为位移检测反馈器件，采用点位控制原理，形成一个闭环似移控制系统。
The displacement sensor of Z axis adopts single point laser position detector PSD, and its resolution is about 10nm.
方向位移传感器采用激光单点位置探测器P SD,Z轴方向的位移测量精度达10纳米。
The main work of this paper is as follows: 1. Design the laser displacement sensor based on the four-quadrant detector, and debugging, calibration and testing of the sensor.
本文的主要工作如下：1。设计了基于四象限的激光位移传感器，并对该传感器进行了调试和标定。
The main work of this paper is as follows: 1. Design the laser displacement sensor based on the four-quadrant detector, and debugging, calibration and testing of the sensor.
本文的主要工作如下：1。设计了基于四象限的激光位移传感器，并对该传感器进行了调试和标定。
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