To create plasma, they applied an oscillating (radio frequency) electric field to the gas using two disk-shaped electrodes located near the top and bottom of the chamber.
为了制造等离子体,他们还在容器上下两个表面安上了电极,加上了射频震荡电场。
To create plasma, they applied an oscillating (radio frequency) electric field to the gas using two disk-shaped electrodes located near the top and bottom of the chamber.
为了制造等离子体,他们还在容器上下两个表面安上了电极,加上了射频震荡电场。
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