To improve the precision of the laser direct writing device, researches have been done for the focusing servo system.
为了提高在激光直写设备中光刻系统的写入精度，对光探头调焦系统进行了研究。
The optical writing object lens of the laser direct writing device must be focused in spots by a focusing-servo mechanism.
在激光直接写入设备中需要有高分辨力的调焦伺服机构对光刻物镜进行调焦伺服。
The optical writing object lens of the laser direct writing device must be focused in spots by a focusing-servo mechanism.
在激光直接写入设备中需要有高分辨力的调焦伺服机构对光刻物镜进行调焦伺服。
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