The working principle of the new type charge balance differential capacitance micrometer, the design of hardware configuration and the achievable method of software were described.
阐述了新型电平衡式差动电容测微仪的工作原理、硬件结构设计及其软件实现方法。
A micro differential capacitance and a micro harmonic oscillator are studied and designed. The structure of the micro differential capacitance is optimized by use of the ANSYS software.
研究了微电容式压力传感器的差动电容结构设计和微谐振式压力传感器的微谐振子结构设计，利用ANSYS软件对微差动电容的结构进行了优化设计。
The relationship between input angle and output differential capacitance is presented for the realization of the capacitance signal detection of micro electromagnetic disk levitating gyroscope.
为了实现磁悬浮转子微陀螺的电容检测，使用数值积分方法计算了新型磁悬浮转子微陀螺的电容值与转子倾斜角度的关系。
The relationship between input angle and output differential capacitance is presented for the realization of the capacitance signal detection of micro electromagnetic disk levitating gyroscope.
为了实现磁悬浮转子微陀螺的电容检测，使用数值积分方法计算了新型磁悬浮转子微陀螺的电容值与转子倾斜角度的关系。
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