It is also indicated that the pressure sensitivity of the sensor varies with the size of the diaphragm, the mechanical parameters of the material.
同时指出，该传感器的压力响应灵敏度随着膜片的大小、中间硬心的尺寸、材料的力学参量的改变而改变。
According to the result of simulation and characteristic of monocrystalline silicon SOI structure, a novel high temperature SOI pressure sensor with a rectangle diaphragm was designed.
根据模拟结果并结合单晶硅材料和SOI结构的特点，设计出了矩形应力膜单晶硅soi高温压力传感器芯片。
As a result of the pressure action and the resultant diaphragm movement a permanent magnet fastened on the diaphragm moves in the direction of a hall sensor arranged outside the pressure case.
由于压力作用的结果及所造成的隔膜运动的永久磁铁关于在大厅方向移动固定传感器膜片安排以外的压力情况。
A novel pressure sensor with a mesa structure diaphragm is presented, which has a mesa structure diaphragm rather than the planar one.
提出了一种新的光纤压力传感器的设计，该传感器敏感膜采用了台面结构而非传统的平面结构。
Also can be used with piston diaphragm made of a very dynamic measurement of high voltage, single capacitive pressure sensor.
还可以采取带活塞动极膜片制成测量高压的单电容式压力传感器。
Also can be used with piston diaphragm made of a very dynamic measurement of high voltage, single capacitive pressure sensor.
还可以采取带活塞动极膜片制成测量高压的单电容式压力传感器。
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