The strain distribution based on small and large deflection theories of diamond square diaphragm was studied using theories of plate bend.
采用薄板弯曲理论研究了均匀载荷作用下多晶金刚石方膜在小挠度和大挠度下的应变分布情况。
We present an analytical solution for the total stress and mechanical sensitivity of highly boron doped si diaphragm with small deflection considering effect to result from the residual stress.
给出了小挠度下，在外界载荷作用下总应力表达式和薄膜机械灵敏度表达式，并分析了残余应力对二者的影响。
We present an analytical solution for the total stress and mechanical sensitivity of highly boron doped si diaphragm with small deflection considering effect to result from the residual stress.
给出了小挠度下，在外界载荷作用下总应力表达式和薄膜机械灵敏度表达式，并分析了残余应力对二者的影响。
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