The voltage drop of interface is relevant to the measured capacitance, the film capacitance and the depletion capacitance.

界面电位降与测量电容、薄膜电容及耗尽层电容有关。

youdao

For many generations, the most significant part of the EOT scaling problem was the depletion capacitance of polysilicon gates.

很多代以来，EOT缩小的一个大问题就是多晶硅栅的耗尽电容问题。

youdao

For many generations, the most significant part of the EOT scaling problem was the depletion capacitance of polysilicon gates.

很多代以来，EOT缩小的一个大问题就是多晶硅栅的耗尽电容问题。

youdao