The cantilever itself can be used as a point diffraction interferometer element, and a new optical interference probe based on this is set up to measure the deflection or amplitude of the cantilever.
发现了由于V形微探针的结构特点而引起的点衍射干涉现象，并据此构成了一种基于点衍射干涉的微探针振幅测量的干涉光探针，这种干涉光探针在国内外至今未见相同的报导。
The cantilever itself can be used as a point diffraction interferometer element, and a new optical interference probe based on this is set up to measure the deflection or amplitude of the cantilever.
发现了由于V形微探针的结构特点而引起的点衍射干涉现象，并据此构成了一种基于点衍射干涉的微探针振幅测量的干涉光探针，这种干涉光探针在国内外至今未见相同的报导。
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