The experience formula, which can better describe the fabrication errors of the deep etched binary optics element, is presented.
将深刻蚀二元光学元件与一般二元光学元件制作误差规律的不同之处进行了分析说明；
The experience formula, which can better describe the fabrication errors of the deep etched binary optics element, is presented.
将深刻蚀二元光学元件与一般二元光学元件制作误差规律的不同之处进行了分析说明；
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