The effects of the condensing layer of the cryopanel on the cryopump capabilities were analyzed.
分析了液氦低温板的凝结层对低温泵性能的影响。
To decrease the radiation heat load of the cryopanel is considered to be necessary for the design of cryopumps.
减小低温板的辐射热负荷是低温泵设计中的关键问题。
By simulating the temperature of the cryopanel and the relation between the pressure and pumping gas speed of the cryopump, it was verified the vacuum system design was rational.
通过对低温泵的真空度及其抽速与液氦低温板温度的关系进行模拟，验证了真空系统设计的合理性。
By simulating the temperature of the cryopanel and the relation between the pressure and pumping gas speed of the cryopump, it was verified the vacuum system design was rational.
通过对低温泵的真空度及其抽速与液氦低温板温度的关系进行模拟，验证了真空系统设计的合理性。
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