Control strategy of detection platform for IC wafer and calibration technology in detection.
IC晶片检测平台的控制策略和检测中的标定技术研究。
Average wafer thickness value on basis of 100% control with an automatic inspection system.
晶片的平均厚度值以100%控制的自动检测系统的测量值为基础。
The flags of PMAC is used as the general I/O interface and the pneumatic control loop of the wafer robot is designed.
并将PMAC的标志控制口改作为通用I/O口，在此基础上进行了硅片传输机器人的气动控制回路的设计。
It can make up the shortage that only the periodic dots or lines can be made when using laser standing wave field to control the atoms to stack on wafer in atom lithography.
弥补了原子光刻技术中利用激光驻波场控制原子堆积只能制作单一量子点、线等周期性图形的不足。
Motion control system of an ultra precision wafer stage with application to integrated circuit production was presented.
描述一种应用于集成电路制造的超精密硅片台系统及其运动控制。
When one side place wafer on the conveyor, another side absorb wafer at the same time. Save control time, absorb wafer faster, increase production capacity.
同步吸取与放置：当一边放置硅片到运输轨道时，另一边同时在吸取硅睡，这样没有浪费中间的控制时间，可以更快速的吸取硅片，提高产能。
With large size wafer, the uniformity of thickness & Resistivity was out of control line.
主要是随着衬底尺寸的增长，外延层的厚度、电阻率均匀性无法满足要求。
A new agent-based dynamic scheduling approach for semiconductor wafer fabrication was proposed, which integrated release control, dispatching and machine preventive maintenance scheduling.
基于智能体技术，提出了芯片制造生产线动态调度新方法，实现了投料调度、工件调度与设备维护调度的集成。
Content and methods of shop-floor control in semiconductor wafer fabricati…
本文介绍了半导体晶圆制造车间层控制的内容及方法。
The ZSFD wafer Signal butterfly valve consists of the wafer butterfly valve and the electric control device.
ZSFD型对夹式信号蝶阀是由对夹式蝶阀及电控装置等组成。
The ZSFD wafer Signal butterfly valve consists of the wafer butterfly valve and the electric control device.
ZSFD型对夹式信号蝶阀是由对夹式蝶阀及电控装置等组成。
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