In order to find the best fabrication control combination, this paper studied rework strategies to be applied in coordination with some commonly used dispatching rules at the photolithography stage.
本文讨论在微影黄光区中几种再加工策略，并与常用的派工法则配合，期找出最适的生产控制组合。
In the automatic control, combination of the step motor with computer is more and more close.
自动控制中，步进电动机与电子计算机的结合越来越紧密。
In the automatic control, combination of the step motor with computer is more and more close.
自动控制中，步进电动机与电子计算机的结合越来越紧密。
应用推荐