The composition depth profile and chemical states of nitrogen-implanted layers were determined using X-ray photoelectron spectroscopy (XPS).
利用X射线光电子能谱（XPS）研究了注氮层中元素的深度分布和化学结构；
The composition depth profile and chemical states of nitrogen-implanted layers were determined using X-ray photoelectron spectroscopy (XPS).
利用X射线光电子能谱（XPS）研究了注氮层中元素的深度分布和化学结构；
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