The composition depth profile and chemical states of nitrogen-implanted layers were determined using X-ray photoelectron spectroscopy (XPS).
利用X射线光电子能谱（XPS）研究了注氮层中元素的深度分布和化学结构；
Tritium is very important fusion materials, it has been broad applied both in military area and in civil area. It is very important to study the depth profile and composition of tritium in materials.
氚是一种重要的聚变材料，在军事和民用方面都有广泛的用途，氚在薄膜靶中的浓度和深度研究是一项重要的课题。
Tritium is very important fusion materials, it has been broad applied both in military area and in civil area. It is very important to study the depth profile and composition of tritium in materials.
氚是一种重要的聚变材料，在军事和民用方面都有广泛的用途，氚在薄膜靶中的浓度和深度研究是一项重要的课题。
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