The composition of MKS pressure control system, the communication commands and parameters of 651c controller and the method on building serial communication protocol macro are all introduced.
介绍了MKS压力控制系统的组成、651c控制器的通信命令参数、串行通信协议宏的构造方法。
The composition of MKS pressure control system, the communication commands and parameters of 651c controller and the method on building serial communication protocol macro are all introduced.
介绍了MKS压力控制系统的组成、651c控制器的通信命令参数、串行通信协议宏的构造方法。
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