To enhance the effect of simulation on MEMS design, this paper introduces a collaborative design into MEMS design and proposes the collaborative simulation of MEMS.
为了充分发挥仿真在MEMS设计中的作用，把协同设计的思想引入MEMS仿真中，提出了协同仿真的设计方式。
To enhance the effect of simulation on MEMS design, this paper introduces a collaborative design into MEMS design and proposes the collaborative simulation of MEMS.
为了充分发挥仿真在MEMS设计中的作用，把协同设计的思想引入MEMS仿真中，提出了协同仿真的设计方式。
应用推荐