The system of MOCVD was designed, assembled and debugged. Mo substrate was heated in a cold-wall MOCVD reactor in order to heat it more centrally;
设计、组装、调试了MOCVD系统,采用冷壁加热方式,对基体实现选择性加热;
The system of MOCVD was designed, assembled and debugged. Mo substrate was heated in a cold-wall MOCVD reactor in order to heat it more centrally;
设计、组装、调试了MOCVD系统,采用冷壁加热方式,对基体实现选择性加热;
应用推荐