The optical system of the micro digital sun sensor consists of APS CMOS image sensor and MEMS based diaphragm with pinhole array structure.
微型数字式太阳敏感器光学系统由APSCMOS图像传感器和基于MEMS工艺的小孔阵列式光线引入器组成。
This paper presented an on-chip integration of SOI (Silicon on insulator) CMOS analog IC and piezoresistive cantilever based on the techniques of MEMS and SOI CMOS.
基于MEMS技术和SOICMOS技术提出了一个包含放大电路与悬臂梁式压阻传感器的集成化方案。
An integrated CMOS-compatible Pirani vacuum sensor system has been investigated and developed in this work, combining the traditional Pirani gauge with the MEMS technology.
本文将传统的皮拉尼计与MEMS技术结合起来，研制了一款与标准CMOS工艺兼容的集成皮拉尼传感器系统。
MEMS devices with minimum volume and cost were realized by the embedded CMOS process.
通过这种嵌入式CMOS工艺技术，可以实现具备最小体积、最低成本的MEMS器件。
MEMS devices with minimum volume and cost were realized by the embedded CMOS process.
通过这种嵌入式CMOS工艺技术，可以实现具备最小体积、最低成本的MEMS器件。
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