The results show that the surface properties of it with CMP, and then chemically etching are best.

结果表明经过化学机械抛光随后再经腐蚀后的蓝宝石衬底的表面性能最好。

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The results show that the surface properties of it with CMP, and then chemically etching are best.

结果表明经过化学机械抛光随后再经腐蚀后的蓝宝石衬底的表面性能最好。

youdao