Magnetron has filamentary cathode with small time hearting the shielded cathodic site liquid and air cooling and also the filter built-in by radio.
该磁控管具有加热时间短的阴极，屏蔽阴极，液体和空气冷却，内建无线电滤波。
The study showed that the maxim secondary emission coefficient of rare earth molybdenum cathode materials was 2.45, which meet the requirement (>2.0) of magnetron to the cathode materials.
研究结果表明，稀土钼次级发射材料的阴极试样的最大次级发射系数达到2.45，满足了磁控管对阴极材料的次级发射系数2.0以上的应用要求。
Using beam emission models, the influence to the magnetron characteristics by the cathode current destiny can be obtained.
利用磁路电子注发射方式针对不同的阴极发射电流进行了动态模拟，得到了不同发射电流条件下磁控管的工作特性。
The invention discloses a multi-element high-temperature resistant anti-shock magnetron cathode which comprises tungsten, thorium, rhenium and potassium.
本发明公开了一种多元素耐高温抗震磁控管阴极，由钨、钍、铼、钾组成。
The invention relates to a method for operating a magnetron sputter cathode, in particular a tube cathode or several tube cathodes forming an array.
本发明涉及一种用于操作磁控管溅射阴极、特别是阴极管或形成 一个阵列的几个阴极管的方法。
The utility model relates to a semi-circular column magnetic control sputtering cathode, belonging to a sputtering source component of a magnetron sputtering device.
一种半圆柱磁控溅射阴极，属于磁控溅射装置中的溅射源部件。
An alternative current medium frequency pulsed magnetron sputtering cathode power supply was introduced.
本文介绍了一种中频交流脉冲式磁控溅射靶极电源。
The plasma can be 4 generated by hot-cathode discharge or RF discharge of gas. In addition, the device has four metal plasma sources, two magnetron sputtering targets, cold and hot target supports.
真空室内的气体等离子体可由热灯丝或射频放电产生，4另外还配置了4个金属等离子体源、两套磁控溅射靶和冷却靶台。
The plasma can be 4 generated by hot-cathode discharge or RF discharge of gas. In addition, the device has four metal plasma sources, two magnetron sputtering targets, cold and hot target supports.
真空室内的气体等离子体可由热灯丝或射频放电产生，4另外还配置了4个金属等离子体源、两套磁控溅射靶和冷却靶台。
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