Based on the structure and the working principle of the wheel-type flow sensor, the capacitive measuring circuits of the sensor are designed.
从叶轮式微流量传感器的结构及工作原理出发，设计了该传感器的电容检测电路。
The specific structure capacitive force sensor, principle and circuit design are introduced, the related experiment data is given out.
从结构设计、工作原理、电路设计对该电容式力传感器进行了分析、论述。 并且提供了相应的实验数据。
A novel capacitive temperature sensor employing a sandwich structure is presented.
本文提出了一种新型的多层梁结构的电容式温度传感器。
The specific structure capacitive force sensor, principle and circuit design are introduced, the related experiment data is given out. The linear distortion of sensor is smaller than 1%.
介绍了一种特殊结构的电容式力传感器。从结构设计、工作原理、电路设计对该电容式力传感器进行了分析、论述。并且提供了相应的实验数据。传感器非线性误差小于1%。
A new type of double capacitive material level sensor which adopts a structure of double-capacitor is designed.
采用双电容器的结构设计了一种新型双电容式料位传感器。
The invention provides a capacitive position sensor with a two-layer electrode structure.
本发明提供一种具有二层电极结构的电容性位置传感器。
A differential capacitive type dynamic tension sensor is developed and the design of its elastomer and structure is given.
介绍一种研制成功的电容式动态张力传感器，给出其弹性体及结构设计。
The specific structure capacitive force micro-sensor is introduced. The principle and survey circuit demonstrated are demonstrated and analyzed.
介绍了一种经特殊工艺处理的电容式压力微传感器，分析和论证了其结构设计、工作原理和测量电路。
The basic structure and manufacturing process of the capacitive polymer humidity sensor are introduced.
介绍了电容式高分子湿敏元件的基本结构及制造工艺。
Comparison of the MEMS-based capacitive pressure sensor with a general structure sensor, the output linearity of the proposed sensor has been improved by 48.38%, reaching 1.6%.
分析结果表明，与常规的双极板微型电容式压力传感器相比，新型结构压力传感器的线性度改善了48.38%，达到了1.6%。
Comparison of the MEMS-based capacitive pressure sensor with a general structure sensor, the output linearity of the proposed sensor has been improved by 48.38%, reaching 1.6%.
分析结果表明，与常规的双极板微型电容式压力传感器相比，新型结构压力传感器的线性度改善了48.38%，达到了1.6%。
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