A novel micromachined capacitive accelerometer, based on slide-film damping principle, was reported.
介绍了一种新型基于滑膜阻尼的电容式微机械加速度计。
The integrated MEMS capacitive accelerometer interface circuit will be studied here in this dissertation.
本论文针对MEMS电容式加速度传感器的单片集成接口电路进行了深入的研究。
This paper is to research and design the low-pass filter of the MEMS capacitive accelerometer sensor readout circuit.
本文研究设计了适于MEMS电容加速度传感器读出电路的低通滤波器。
With the wide range use of the capacitive accelerometer, it's particularly important to test some key parameters such as quality factor and resonance frequency accurately.
随着电容式加速度传感器的广泛使用，对其品质因子、谐振频率等关键参数的器件级测试显得尤为重要。
The operational principle and the lumped parameters model of capacitive micro-accelerometer are introduced.
介绍了微加速度计的工作原理，得出了不同方向上的加速度计的等效刚度。
Silicon micro-accelerometer can measure the acceleration of the movement, and there are many kinds of Micro-accelerometer based on piezoelectric, tunnel, piezoresistive, capacitive effect.
硅微机械加速度计作为一种可以测量加速度的传感器，可分为压电式、隧道式、压阻式和电容式等。
The noise of capacitive micro accelerometer include mechanical thermal noise and electrical thermal noise;
电容式微加速度计的噪声包括机械热噪声和电热噪声；
A digital processing system based on a capacitive MEMS accelerometer is introduced, the analysis is concentrated on the temperature characteristic of DA and AD.
本文介绍了一种电容式微机械加速度计的数字化处理电路，并重点介绍了数模转换器和模数转换器的温度特性。
For its high sensitivity, good linearity and stability, capacitive micromachined accelerometer is of great concern among many kinds of accelerometers.
电容检测式微机械加速度计因为其具有较高的灵敏度、线性度和稳定性，所以在各种检测形式的加速度计中备受关注。
For its high sensitivity, good linearity and stability, capacitive micromachined accelerometer is of great concern among many kinds of accelerometers.
电容检测式微机械加速度计因为其具有较高的灵敏度、线性度和稳定性，所以在各种检测形式的加速度计中备受关注。
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