With the Doppler laser vibration measurement system, the vibration velocity curves of the flip chip and tool tip were obtained during thermo-sonic flip chip bonding.
采用多普勒激光振动测量系统,获得了热超声倒装键合过程中工具末端及芯片的振动速度曲线。
With the Doppler laser vibration measurement system, the vibration velocity curves of the flip chip and tool tip were obtained during thermo-sonic flip chip bonding.
采用多普勒激光振动测量系统,获得了热超声倒装键合过程中工具末端及芯片的振动速度曲线。
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