A high removal rate of surface impurities by ion cluster bombardment has been confirmed in connection with low damage effects.
已经证实气体团束轰击对表面沾污具有很高的清除率，同时却引起较低的损伤。
A high removal rate of surface impurities by ion cluster bombardment has been confirmed in connection with low damage effects.
已经证实气体团束轰击对表面沾污具有很高的清除率，同时却引起较低的损伤。
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