In this dissertation, only the piezoelectric bimorph micro-actuator and valveless piezoelectric micro pump are introduced.
本文的研究重点是压电双晶梁微驱动器和无阀压电微泵。
A new precise actuator with 2 degrees of freedom for translational and rotational motions actuated by the impact force of an end-loaded piezoelectric bimorph cantilever was proposed.
研制了一种以自由端带有集中质量的悬臂式压电双晶片为驱动单元、具有移动和旋转二自由度的惯性冲击式精密驱动器。
A new precise actuator with 2 degrees of freedom for translational and rotational motions actuated by the impact force of an end-loaded piezoelectric bimorph cantilever was proposed.
研制了一种以自由端带有集中质量的悬臂式压电双晶片为驱动单元、具有移动和旋转二自由度的惯性冲击式精密驱动器。
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