The process flow is optimized through the adjustment of process parameters to get a good thickness uniformity of less than 3% by adjusting the compensation bezel.
优化工艺参数，通过调整补偿挡板使膜厚均匀性控制在3%以内。
The process flow is optimized through the adjustment of process parameters to get a good thickness uniformity of less than 3% by adjusting the compensation bezel.
优化工艺参数，通过调整补偿挡板使膜厚均匀性控制在3%以内。
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