The switching time calculation method of the electrostatic driven MOEMS optical switch with torsion beam structure was presented, and the formula of the switching time was given.
本文结合静电驱动扭臂式MOEMS光开关，给出了响应时间的计算方法，得出开关时间的计算公式。
The switching time calculation method of the electrostatic driven MOEMS optical switch with torsion beam structure was presented, and the formula of the switching time was given.
本文结合静电驱动扭臂式MOEMS光开关，给出了响应时间的计算方法，得出开关时间的计算公式。
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