These implanters feature common hardware and design principles including beam incidence Angle control, dosimetry, and end station design.
这些注入机的特征是硬件和设计原理通用,并包含离子束注入角控制、剂量测定和终端站设计。
These implanters feature common hardware and design principles including beam incidence Angle control, dosimetry, and end station design.
这些注入机的特征是硬件和设计原理通用,并包含离子束注入角控制、剂量测定和终端站设计。
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